研究成果藝廊

Instrumentation Research

Prototype of micro-lamp for the calibration source of SAFARI

開啟圖片
圖片來源: Ming-Jye Wang
Prototype of micro-lamp for the calibration source of SAFARI

The OM image of micro-lamp for the calibration source of SAFARI. The hot area is about 260x260 um^2 which is heated by chrome film heater and thermally isolated by four 10 um wide and 1um thick SiNx legs.